"Novel Deep Trench Buried-Body-Contact (DBBC) of 4F2 cell for ..."

Youngseung Cho et al. (2012)

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DOI: 10.1109/ESSDERC.2012.6343366

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-19

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Youngseung Cho, Yoosang Hwang, Huijung Kim, Eunok Lee, Soojin Hong, Hyun-Woo Chung, Daeik Kim, Jinyoung Kim, Yong Chul Oh, Hyeongsun Hong, Gyo-Young Jin, Chilhee Chung:
Novel Deep Trench Buried-Body-Contact (DBBC) of 4F² cell for sub 30nm DRAM technology. ESSDERC 2012: 193-196

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