"Multiscale Modeling Study of Native Oxide Growth on a Si(100) Surface."

Lukas Cvitkovich et al. (2021)

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DOI: 10.1109/ESSDERC53440.2021.9631790

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Lukas Cvitkovich, Markus Jech, Dominic Waldhör, Al-Moatasem El-Sayed, Christoph Wilhelmer, Tibor Grasser:
Multiscale Modeling Study of Native Oxide Growth on a Si(100) Surface. ESSDERC 2021: 235-238

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