"High-NA EUV Optics - The key for miniaturization of integrated circuits in ..."

Heiko Feldmann et al. (2019)

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DOI: 10.1109/ESSDERC.2019.8901696

access: closed

type: Conference or Workshop Paper

metadata version: 2019-11-28

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Heiko Feldmann, Paul Gräupner, Peter Kürz, Winfried Kaiser:
High-NA EUV Optics - The key for miniaturization of integrated circuits in the next decade. ESSDERC 2019: 61-63

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