"H2 annealing for metallic contaminant reduction in BCD-SOI process: ..."

Gabriella Ghidini et al. (2015)

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DOI: 10.1109/ESSDERC.2015.7324772

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Gabriella Ghidini, Daniele Merlini, Massimiliano Cannavo, Maria Luisa Polignano, Isabella Mica, Amos Galbiati, Lucia Zullino, Riccardo Turconi, Salvatore Grasso, Maurizio Moroni, Davide Codegoni:
H2 annealing for metallic contaminant reduction in BCD-SOI process: Benefits and drawbacks. ESSDERC 2015: 294-297

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