"On the strain induced by arsenic into silicon."

Stéphane Koffel et al. (2013)

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DOI: 10.1109/ESSDERC.2013.6818855

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-21

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  - conf/essderc/KoffelPLBNS13
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  - https://dblp.org/rec/conf/essderc/KoffelPLBNS13
Stéphane Koffel, Peter Pichler, Jürgen Lorenz, Gabriele Bisognin, Enrico Napolitani, Davide De Salvador:
On the strain induced by arsenic into silicon. ESSDERC 2013: 206-209

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