"Mobility enhancement by integration of TmSiO IL in 0.65nm EOT high-k/metal ..."

Eugenio Dentoni Litta, Per-Erik Hellström, Mikael Östling (2013)

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DOI: 10.1109/ESSDERC.2013.6818842

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Eugenio Dentoni Litta, Per-Erik Hellström, Mikael Östling:
Mobility enhancement by integration of TmSiO IL in 0.65nm EOT high-k/metal gate MOSFETs. ESSDERC 2013: 155-158

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