"Wafer-scale fabrication of biologically sensitive Si nanowire FET: from pH ..."

R. Midahuen et al. (2021)

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DOI: 10.1109/ESSDERC53440.2021.9631772

access: closed

type: Conference or Workshop Paper

metadata version: 2025-11-02

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R. Midahuen, Bernard Previtali, C. Fontelaye, Guillaume Nonglaton, V. Stambouli, Sylvain Barraud:
Wafer-scale fabrication of biologically sensitive Si nanowire FET: from pH sensing to electrical detection of DNA hybridization. ESSDERC 2021: 175-178

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