"22FD-SOI Variability Improvement Thanks to SmartCut Thickness Control at ..."

Walter Schwarzenbach et al. (2019)

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DOI: 10.1109/ESSDERC.2019.8901827

access: closed

type: Conference or Workshop Paper

metadata version: 2021-02-03

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Walter Schwarzenbach, L. Loubriat, Vincent Joseph, Laurent Viravaux, Olivier Moreau, Sebastien Lasserre, Bich-Yen Nguyen:
22FD-SOI Variability Improvement Thanks to SmartCut Thickness Control at Atomic Scale. ESSDERC 2019: 64-65

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