"Evolution and Optimization of BEOL MOM Capacitors Across Advanced CMOS Nodes."

Jinglin Shi et al. (2018)

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DOI: 10.1109/ESSDERC.2018.8486905

access: closed

type: Conference or Workshop Paper

metadata version: 2021-03-26

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Jinglin Shi, A. Sidelnicov, Kok Wai J. Chew, Mei See Chin, C. Schippel, J. M. M. dos Santos, Frank Schlaphof, Lutz Meinshausen, John R. Long, David L. Harame:
Evolution and Optimization of BEOL MOM Capacitors Across Advanced CMOS Nodes. ESSDERC 2018: 190-193

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