"Effective work function engineering by sacrificial lanthanum diffusion on ..."

Carlos Suarez-Segovia et al. (2015)

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DOI: 10.1109/ESSDERC.2015.7324760

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-03

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Carlos Suarez-Segovia, Charles Leroux, Florian Domengie, Karen Dabertrand, Vincent Joseph, Giovanni Romano, Pierre Caubet, Stephane Zoll, Olivier Weber, Gérard Ghibaudo, Gilles Reimbold, Michel Haond:
Effective work function engineering by sacrificial lanthanum diffusion on HfON-based 14 nm NFET devices. ESSDERC 2015: 246-249

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