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"An industrial feedback on the use of OPC UA for the vertical integration ..."

Fahad Rafique Golra, Marc Engel (2021)

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DOI: 10.1109/ETFA45728.2021.9613384

access: closed

type: Conference or Workshop Paper

metadata version: 2024-04-24

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Fahad Rafique Golra, Marc Engel:
An industrial feedback on the use of OPC UA for the vertical integration of semiconductor front-ends. ETFA 2021: 1-4

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