"A bottom-inlet type MEMS acoustic sensor with wheel-shaped back-plate anchor."

Jaewoo Lee et al. (2013)

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DOI: 10.1109/EUROCON.2013.6625273

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Jaewoo Lee, C. H. Je, Woo-Seok Yang, Jongdae Kim:
A bottom-inlet type MEMS acoustic sensor with wheel-shaped back-plate anchor. EUROCON 2013: 2116-2122

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