"An Automatic Insertion Scheme of Extra Via for DSA-MP Hybrid Lithography."

Yuqin Wang et al. (2024)

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DOI: 10.1145/3649476.3658788

access: closed

type: Conference or Workshop Paper

metadata version: 2025-01-19

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Yuqin Wang, Cheng Guo, Xiaojing Su, Xin Hong, Zixi Liu, Xiaohuan Ling, Bojie Ma, Pengyu Ren, Yujie Jiang, Yajuan Su, Yayi Wei:
An Automatic Insertion Scheme of Extra Via for DSA-MP Hybrid Lithography. ACM Great Lakes Symposium on VLSI 2024: 520-524

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