"Design and simulation a MEMS microgripper with integrated electrothermal ..."

Sijie Yang, Qingsong Xu (2016)

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DOI: 10.1109/ICARM.2016.7606931

access: closed

type: Conference or Workshop Paper

metadata version: 2019-09-16

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Sijie Yang, Qingsong Xu:
Design and simulation a MEMS microgripper with integrated electrothermal actuator and force sensor. ICARM 2016: 271-276

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