"A Multi-sensor Big Data fusion Method in Quality Prediction of the Plasma ..."

Yiming Guo et al. (2019)

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DOI: 10.1145/3372454.3372479

access: closed

type: Conference or Workshop Paper

metadata version: 2020-01-23

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Yiming Guo, Zhijie Xia, Zhisheng Zhang, Mengze Sun:
A Multi-sensor Big Data fusion Method in Quality Prediction of the Plasma Enhanced Chemical Vapor Deposition Process. ICBDR 2019: 24-29

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