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"Virtual Metrology for Semiconductor Chemical Mechanical Planarization ..."

Fuzuo Zhang, Wenlan Jiang, Huan-gang Wang (2021)

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DOI: 10.1145/3497623.3497679

access: closed

type: Conference or Workshop Paper

metadata version: 2022-02-08

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Fuzuo Zhang, Wenlan Jiang, Huan-gang Wang:
Virtual Metrology for Semiconductor Chemical Mechanical Planarization Process Using Wide & Deep Learning. ICCPR 2021: 345-349

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