"Application of Data Mining for Improving Yield in Wafer Fabrication System."

Dong-Hyun Baek, In-Jae Jeong, Chang Hee Han (2005)

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DOI: 10.1007/11424925_25

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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Dong-Hyun Baek, In-Jae Jeong, Chang Hee Han:
Application of Data Mining for Improving Yield in Wafer Fabrication System. ICCSA (4) 2005: 222-231

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