"On-Chip High Voltage Generation With standard process for MEMS."

Ming Zhang, Nicolas Llaser (2007)

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DOI: 10.1109/ICECS.2007.4510920

access: closed

type: Conference or Workshop Paper

metadata version: 2018-09-04

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Ming Zhang, Nicolas Llaser:
On-Chip High Voltage Generation With standard process for MEMS. ICECS 2007: 18-21

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