"Fabrication and Characterization of Lateral-Directional Actuator Using ..."

Kensuke Kanda et al. (2012)

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DOI: 10.1109/ICETET.2012.11

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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Kensuke Kanda, Yu Akashi, Takashi Saito, Takayuki Fujita, Kohei Higuchi, Kazusuke Maenaka:
Fabrication and Characterization of Lateral-Directional Actuator Using Pb(Zr, Ti)O_3 Thin Films. ICETET 2012: 124-127

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