"Wafer Level Packaging for MEMS Geiger Counter."

Asei Miyamoto et al. (2012)

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DOI: 10.1109/ICETET.2012.20

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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Asei Miyamoto, Taichi Hashimoto, Kenichi Makimura, Kensuke Kanda, Takayuki Fujita, Kazusuke Maenaka:
Wafer Level Packaging for MEMS Geiger Counter. ICETET 2012: 66-69

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