"Reliability driven guideline for BEOL Optimization: Protecting MOS stacks ..."

Ziyuan Liu et al. (2012)

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DOI: 10.1109/ICICDT.2012.6232838

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-15

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Ziyuan Liu, Fumihiko Hayashi, Shinji Fujieda, Markus Wilde, Katsuyuki Fukutani:
Reliability driven guideline for BEOL Optimization: Protecting MOS stacks from hydrogen-related impurity penetration. ICICDT 2012: 1-4

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