"Nondestructive Evaluation of MEMS Devices by Laser Confocal Measurements."

Xiao-Ming Wu et al. (2005)

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DOI: 10.1109/ICMENS.2005.87

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Xiao-Ming Wu, Ning-xin Zhang, Tianling Ren, Litian Liu:
Nondestructive Evaluation of MEMS Devices by Laser Confocal Measurements. ICMENS 2005: 69-76

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