"Motion Control of Piezoelectric Actuator for High-Speed AFM Systems."

Feng-Yueh Chan, Chi-Ying Lin (2019)

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DOI: 10.1109/ICPHYS.2019.8780256

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Feng-Yueh Chan, Chi-Ying Lin:
Motion Control of Piezoelectric Actuator for High-Speed AFM Systems. ICPS 2019: 472-477

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