"High Sensitive Micro Touch Sensor with Piezoelectric Thin Film for Micro ..."

Fumihito Arai et al. (2004)

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DOI: 10.1109/ROBOT.2004.1308012

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Fumihito Arai, Kouhei Motoo, Toshio Fukuda, Tohoru Katsuragi:
High Sensitive Micro Touch Sensor with Piezoelectric Thin Film for Micro Pipetting Works under Microscope. ICRA 2004: 1352-1357

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