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"A Colored Petri Net-based Approach to the Design of 300mm Wafer Fab ..."
Jonghun Park et al. (2001)
- Jonghun Park, Spyros A. Reveliotis, Douglas A. Bodner, Chen Zhou, Leon F. McGinnis:
A Colored Petri Net-based Approach to the Design of 300mm Wafer Fab Controllers. ICRA 2001: 1813-1819
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