"A Colored Petri Net-based Approach to the Design of 300mm Wafer Fab ..."

Jonghun Park et al. (2001)

Details and statistics

DOI: 10.1109/ROBOT.2001.932872

access: closed

type: Conference or Workshop Paper

metadata version: 2023-01-10

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.