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"Towards Automated Micromachining of PMMA Micro Channels using CO/Sub 2/ ..."

Guangyi Shi et al. (2004)

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DOI: 10.1109/ROBOT.2004.1307129

access: closed

type: Conference or Workshop Paper

metadata version: 2020-08-14

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  dblp key:
  - conf/icra/ShiHLHSL04
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  - https://dblp.org/rec/conf/icra/ShiHLHSL04
Guangyi Shi, Qiang Huang, Wen J. Li, Wenqian Huang, Gengchen Shi, Kejie Li:
Towards Automated Micromachining of PMMA Micro Channels using CO/Sub 2/ Laser and Sacrificial Mask Process. ICRA 2004: 57-62

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