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"Integrated MEMS actuators for sub-Micron patterning on thin polymer films."
Emad Mehdizadeh, Siavash Pourkamali (2014)
- Emad Mehdizadeh, Siavash Pourkamali:
Integrated MEMS actuators for sub-Micron patterning on thin polymer films. IECON 2014: 2357-2360
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