"Limiting current-type MEMS oxygen gas sensor integrated with micro-hotplate."

Shunsuke Akasaka, Isaku Kanno (2021)

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DOI: 10.1109/SENSORS47087.2021.9639801

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Shunsuke Akasaka, Isaku Kanno:
Limiting current-type MEMS oxygen gas sensor integrated with micro-hotplate. IEEE SENSORS 2021: 1-4

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