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"Investigating the piezoelectric response of Mg-Ti-doped-AlN thin films for ..."
Sri Ayu Anggraini et al. (2017)
- Sri Ayu Anggraini
, Masato Uehara
, Hiroshi Yamada, Morito Akiyama:
Investigating the piezoelectric response of Mg-Ti-doped-AlN thin films for sensor application. IEEE SENSORS 2017: 1-3
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