"A monolithic three axial electrochemical seismic sensor based on MEMS ..."

Lianhong Chen et al. (2017)

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DOI: 10.1109/ICSENS.2017.8234154

access: closed

type: Conference or Workshop Paper

metadata version: 2023-10-23

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Lianhong Chen, Deyong Chen, Junbo Wang, Zhenyuan Sun, Guanglei Li, Jian Chen:
A monolithic three axial electrochemical seismic sensor based on MEMS technology. IEEE SENSORS 2017: 1-3

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