"50-kHz MEMS gyroscopes based on NEMS sensing with 1.3 mdps/√Hz ARW ..."

Marco Gadola et al. (2020)

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DOI: 10.1109/SENSORS47125.2020.9278893

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Marco Gadola, Federico Maspero, Giacomo Langfelder, Marc Sansa, Thierry Verdot, Audrey Berthelot, Philippe Robert:
50-kHz MEMS gyroscopes based on NEMS sensing with 1.3 mdps/√Hz ARW and 0.5°/h stability. IEEE SENSORS 2020: 1-4

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