"TiN-C Based CMOS MEMS Pirani Gauge for on-Chip Pressure Measurement."

Manu Garg et al. (2023)

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DOI: 10.1109/SENSORS56945.2023.10325154

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-05

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Manu Garg, Fang-Wei Tsai, Khanjan Joshi, Yi Chiu, Pushpapraj Singh:
TiN-C Based CMOS MEMS Pirani Gauge for on-Chip Pressure Measurement. SENSORS 2023: 1-4

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