"A 36% Scandium Aluminum Nitride pMUT - FBAR Dual Mode Pressure Sensor for ..."

Walter Gubinelli et al. (2023)

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DOI: 10.1109/SENSORS56945.2023.10325115

access: closed

type: Conference or Workshop Paper

metadata version: 2025-03-03

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Walter Gubinelli, Luca Colombo, Bernard Herrera Soukup, Pietro Simeoni, Blair Kopp, Alberto Corigliano, Cristian Cassella, Matteo Rinaldi:
A 36% Scandium Aluminum Nitride pMUT - FBAR Dual Mode Pressure Sensor for IoT Applications. SENSORS 2023: 1-4

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