"A New Nonlinear Micromechanical Structure Used in MEMS Inertial Sensors."

Milad Seifnejad Haghighi et al. (2024)

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DOI: 10.1109/SENSORS60989.2024.10784842

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type: Conference or Workshop Paper

metadata version: 2025-02-04

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Milad Seifnejad Haghighi, Peyman Firoozy, Mikhail Kanygin, Emad Esmaeili, Behraad Bahreyni:
A New Nonlinear Micromechanical Structure Used in MEMS Inertial Sensors. IEEE SENSORS 2024: 1-4

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