"Commercial Production of Low-k PZT film using Sputtering Method."

Mario Kiuchi et al. (2020)

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DOI: 10.1109/SENSORS47125.2020.9278888

access: closed

type: Conference or Workshop Paper

metadata version: 2025-09-06

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Mario Kiuchi, Ryoma Miyake, Shinya Yoshida, Shuji Tanaka, Tsuyoshi Takemoto, Yukitaka Yamaguchi, Kenji Komaki:
Commercial Production of Low-k PZT film using Sputtering Method. IEEE SENSORS 2020: 1-4

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