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"A single-mass self-resonating closed-loop capacitive MEMS accelerometer."
Talha Kose et al. (2016)
- Talha Kose, Yunus Terzioglu, Kivanç Azgin, Tayfun Akin:
A single-mass self-resonating closed-loop capacitive MEMS accelerometer. IEEE SENSORS 2016: 1-3
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