"MEMS Gas Sensor with On-chip Electrospun Ru-SnO2 Nanospheres Patterned by ..."

Jin Li et al. (2024)

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DOI: 10.1109/SENSORS60989.2024.10784716

access: closed

type: Conference or Workshop Paper

metadata version: 2025-02-04

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Jin Li, Xitong Sun, Tongheng Cheng, Fei Wang:
MEMS Gas Sensor with On-chip Electrospun Ru-SnO2 Nanospheres Patterned by Photolithography. IEEE SENSORS 2024: 1-4

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