"Performance Enhancement of Piezoelectric MEMS Microspeaker by Jointed and ..."

Chia-Hao Lin et al. (2024)

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DOI: 10.1109/SENSORS60989.2024.10784975

access: closed

type: Conference or Workshop Paper

metadata version: 2025-02-04

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Chia-Hao Lin, Chin Tseng, Tsung-Wen Tsai, Po-Shen Chen, Mei-Feng Lai, Weileun Fang:
Performance Enhancement of Piezoelectric MEMS Microspeaker by Jointed and Separated Curved Cantilever Array with Phase Modulation Circuit. IEEE SENSORS 2024: 1-4

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