"Hybrid Si Etching for Performance Enhancement of the Atmospheric CMOS MEMS ..."

Pen-Sheng Lin et al. (2020)

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DOI: 10.1109/SENSORS47125.2020.9278644

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Pen-Sheng Lin, Yijia Wang, Ming-Ching Cheng, Yu-Chen Chen, Yu-Cheng Huang, Weileun Fang:
Hybrid Si Etching for Performance Enhancement of the Atmospheric CMOS MEMS Infrared Sensor. IEEE SENSORS 2020: 1-4

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