"Development of MEMS IR source by compound release process with nano-scale ..."

Weibing Liu et al. (2016)

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DOI: 10.1109/ICSENS.2016.7808652

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type: Conference or Workshop Paper

metadata version: 2022-12-28

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Weibing Liu, Anjie Ming, Zhenxin Tan, Qiulin Tan, Xilong Sun, Chaobo Li, Chengyue Yang, Haiyang Mao, Weibing Wang, Jijun Xiong, Dapeng Chen:
Development of MEMS IR source by compound release process with nano-scale silicon forest radiation layer. IEEE SENSORS 2016: 1-3

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