"A Resonant Pressure Micro Sensor with a Stress Isolation Layer."

Yulan Lu et al. (2018)

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DOI: 10.1109/ICSENS.2018.8589846

access: closed

type: Conference or Workshop Paper

metadata version: 2023-10-23

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Yulan Lu, Bo Xie, Qiuxu Wei, Yadong Li, Xiaoqing Shi, Chao Xiang, Deyong Chen, Junbo Wang, Jian Chen:
A Resonant Pressure Micro Sensor with a Stress Isolation Layer. IEEE SENSORS 2018: 1-4

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