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"Design and Test of MEMS Resonant Accelerometer with a Novel Die-Attach ..."

Yukun Ma et al. (2023)

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DOI: 10.1109/SENSORS56945.2023.10325284

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-14

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  dblp key:
  - conf/ieeesensors/MaWXZH23
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  persistent URL:
  - https://dblp.org/rec/conf/ieeesensors/MaWXZH23
Yukun Ma, Shaohang Wang, Wenyi Xu, Rong Zhang, Fengtian Han:
Design and Test of MEMS Resonant Accelerometer with a Novel Die-Attach Structure. SENSORS 2023: 1-4

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