"Silicon Photonics enabled on-chip Optical Readout of piezoMEMS Resonators."

Viphretuo Mere et al. (2020)

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DOI: 10.1109/SENSORS47125.2020.9278816

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-08

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  - conf/ieeesensors/MereTDKNPS20
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  - https://dblp.org/rec/conf/ieeesensors/MereTDKNPS20
Viphretuo Mere, Sudhanshu Tiwari, Aneesh Dash, Rakshitha Kallega, Akshay Naik, Rudra Pratap, Shankar Kumar Selvaraja:
Silicon Photonics enabled on-chip Optical Readout of piezoMEMS Resonators. IEEE SENSORS 2020: 1-4

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