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"Enhancing open-loop control of MEMS using linear electrostatic levitation ..."
Mohammad Mousavi, Mohammad Alzgool, Shahrzad Towfighian (2021)
- Mohammad Mousavi, Mohammad Alzgool, Shahrzad Towfighian:
Enhancing open-loop control of MEMS using linear electrostatic levitation actuators. IEEE SENSORS 2021: 1-4
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