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"An Electrostatic Micropositioner with 3 Degrees-of-Freedom."

Seyedfakhreddin Nabavi, Michaël Ménard, Frederic Nabki (2023)

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DOI: 10.1109/SENSORS56945.2023.10325255

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-14

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  dblp key:
  - conf/ieeesensors/NabaviMN23
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  - https://dblp.org/rec/conf/ieeesensors/NabaviMN23
Seyedfakhreddin Nabavi, Michaël Ménard, Frederic Nabki:
An Electrostatic Micropositioner with 3 Degrees-of-Freedom. SENSORS 2023: 1-4

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