"Fabrication of electrostatically actuated silicon nitride microshutter arrays."

L. Oh et al. (2017)

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DOI: 10.1109/ICSENS.2017.8233933

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-15

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L. Oh, M. Li, K. Kim, D. Kelly, A. Kutyrev, S. Moseley:
Fabrication of electrostatically actuated silicon nitride microshutter arrays. IEEE SENSORS 2017: 1-3

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