"A feasibility study on relative humidity sensing using Silicon-on-Nothing ..."

Mantalena Sarafianou, David Sze Wai Choong, Koh Yul (2022)

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DOI: 10.1109/SENSORS52175.2022.9967062

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-13

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  - conf/ieeesensors/SarafianouCY22
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Mantalena Sarafianou, David Sze Wai Choong, Koh Yul:
A feasibility study on relative humidity sensing using Silicon-on-Nothing pMUTs. IEEE SENSORS 2022: 1-4

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