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"Stress Effects in Semiconducting Metal Oxide (SMOx) Materials on MEMS Gas ..."
Vedant Sumaria, Nishit Goel, Stephen Bart (2021)
- Vedant Sumaria, Nishit Goel, Stephen Bart:
Stress Effects in Semiconducting Metal Oxide (SMOx) Materials on MEMS Gas Sensors. IEEE SENSORS 2021: 1-4
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