"Actuation and Sensing for PZT Micromirrors Using $\mathbf{d}_{33}$ Mode ..."

Pooja Thakkar et al. (2023)

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DOI: 10.1109/SENSORS56945.2023.10324882

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-14

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Pooja Thakkar, Anton Lagosh, Madeleine Petschnigg, Dominik Holzmann, Jaka Pribosek:
Actuation and Sensing for PZT Micromirrors Using $\mathbf{d}_{33}$ Mode Directional Interdigitated Electrodes. SENSORS 2023: 1-4

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