"Free Standing Stress Amplification Structure for Ultrasensitive 3C-SiC/Si ..."

Braiden Tong et al. (2022)

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DOI: 10.1109/SENSORS52175.2022.9967353

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-21

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Braiden Tong, Hong-Quan Nguyen, Tuan-Hung Nguyen, Tuan-Khoa Nguyen, Viet Thanh Nguyen, Toan Dinh, Trung-Hieu Vu, Van Thanh Dau, Dzung Viet Dao:
Free Standing Stress Amplification Structure for Ultrasensitive 3C-SiC/Si Pressure Sensor. IEEE SENSORS 2022: 1-4

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